特殊用法cathode sputtering1.(等离子)阴极溅射diode sputtering1.二极管溅射direct current sputtering1.直流溅射getter sputtering1.【电子】吸气喷 镀glow discharge sputtering1.辉光放电溅射heavy ion sputtering1.重离子溅射high frequency sputtering1.高频溅射(法)ion beam sputtering1.离子束溅射radio-frequency sputtering1.射频溅散reactive sputtering1.反应溅射(法)sputtering of metals1.金属喷镀